JPH0110921Y2 - - Google Patents
Info
- Publication number
- JPH0110921Y2 JPH0110921Y2 JP16785684U JP16785684U JPH0110921Y2 JP H0110921 Y2 JPH0110921 Y2 JP H0110921Y2 JP 16785684 U JP16785684 U JP 16785684U JP 16785684 U JP16785684 U JP 16785684U JP H0110921 Y2 JPH0110921 Y2 JP H0110921Y2
- Authority
- JP
- Japan
- Prior art keywords
- blocks
- heating element
- block
- processing tube
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 40
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 description 14
- 235000012431 wafers Nutrition 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 239000010453 quartz Substances 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 229910000953 kanthal Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16785684U JPH0110921Y2 (en]) | 1984-11-05 | 1984-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16785684U JPH0110921Y2 (en]) | 1984-11-05 | 1984-11-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6183030U JPS6183030U (en]) | 1986-06-02 |
| JPH0110921Y2 true JPH0110921Y2 (en]) | 1989-03-29 |
Family
ID=30725642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16785684U Expired JPH0110921Y2 (en]) | 1984-11-05 | 1984-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0110921Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5187771A (en) * | 1990-11-13 | 1993-02-16 | Tokyo Electron Sagami Limited | Heat processing apparatus utilizing a plurality of stacked heater holders |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2764729B2 (ja) * | 1988-12-06 | 1998-06-11 | 東京エレクトロン株式会社 | 熱処理装置 |
| JP3848442B2 (ja) * | 1997-08-20 | 2006-11-22 | 株式会社日立国際電気 | ヒータ支持装置及び半導体製造装置及び半導体装置の製造方法 |
| JP5096182B2 (ja) * | 2008-01-31 | 2012-12-12 | 東京エレクトロン株式会社 | 熱処理炉 |
| JP5787563B2 (ja) * | 2010-05-11 | 2015-09-30 | 株式会社日立国際電気 | ヒータ支持装置及び加熱装置及び基板処理装置及び半導体装置の製造方法及び基板の製造方法及び保持用ピース |
| JP2020043260A (ja) * | 2018-09-12 | 2020-03-19 | 住友金属鉱山株式会社 | 多結晶膜の成膜方法、基板載置機構および成膜装置 |
-
1984
- 1984-11-05 JP JP16785684U patent/JPH0110921Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5187771A (en) * | 1990-11-13 | 1993-02-16 | Tokyo Electron Sagami Limited | Heat processing apparatus utilizing a plurality of stacked heater holders |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6183030U (en]) | 1986-06-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100956834B1 (ko) | 면형상 히터 | |
| JP3250628B2 (ja) | 縦型半導体熱処理用治具 | |
| US5187771A (en) | Heat processing apparatus utilizing a plurality of stacked heater holders | |
| KR100290047B1 (ko) | 열처리용보트 | |
| US5324920A (en) | Heat treatment apparatus | |
| JPH0110921Y2 (en]) | ||
| KR20040107477A (ko) | 서셉터를 포함한 처리 챔버에서 반도체 기판을 가열하기위한 공정 및 시스템 | |
| US20060193366A1 (en) | Heating element structure with efficient heat generation and mechanical stability | |
| US2959661A (en) | Electric band type heater | |
| JPH0220830Y2 (en]) | ||
| JPH047598Y2 (en]) | ||
| JPH0636479Y2 (ja) | ヒータ装置 | |
| JP2764729B2 (ja) | 熱処理装置 | |
| JP3332168B2 (ja) | 縦型ボート及びその製造方法 | |
| JPH0436076Y2 (en]) | ||
| JPH0582626A (ja) | ボート用テーブル | |
| JP2506408B2 (ja) | ウェ―ハ熱処理用治具 | |
| JPH0718447A (ja) | 熱処理装置 | |
| JP2799695B2 (ja) | ウェーハ熱処理用炭化珪素質ボート | |
| JPS58294Y2 (ja) | 半導体拡散炉 | |
| JP2561297Y2 (ja) | 電気炉用抵抗発熱体 | |
| JPH03771B2 (en]) | ||
| JPH0644102Y2 (ja) | ウエハ−の支持治具 | |
| JP3020774B2 (ja) | 熱処理装置 | |
| JPH0616466Y2 (ja) | 縦形用セラミックファイバー成形ヒータ |